MICROHOTPLATE DEVICE

Introduction to Micro Hot Plate Devices:

Micro hot plate devices are precision heating equipment manufactured using MEMS technology, mainly used for precise control and measurement of temperature in small areas.

Function:

Temperature measurement: used for precise measurement of temperature changes.

Gas detection: detecting specific gas concentrations through temperature changes.

Infrared imaging: Combining infrared technology for thermal distribution imaging.

Process capability:

Materials: silicon, silicon nitride, etc.

Microfabrication: photolithography, etching, etc.

Electroplating: copper, gold, etc.

Encapsulation: Protective shell encapsulation.