Direct laser writer

Type:   DWL66+

Manufacturer: Heidelberg Instruments (Germany)

Specification

Maximum substrate size： 200x200 mm；

Maximum substrate height：≤8mm；

Laser wavelength：405nm；

Laser power：0-300mW;

Minimum linewidth ：≤600nm;

Alignment accuracy：≤300nm;

Dual-side alignment accuracy ：≤1um;

Grayscale： 128/255/1000 level

Other function：thermal control（ ± 0.1° ）；autofocus；