PECVD
Type: PlasmaPro 80
Manufacturer: OXFORD (England)
Open load design allows fast wafer loading and unloading
Excellent etch control and rate determination
Excellent wafer temperature uniformity
Up to 200mm wafers
Contact: Mike
Phone: +86-19820819249
Tel: +86-19820819249
Email: nanofab@diaotuotech.com
Add: Room 103, Building P, Navigator Sci-Tech Park, No. 163, Banxuegang Avenue, Bantian Street, Longgang District, Shenzhen City, Guangdong Province, P.R. China
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