Inductively coupled plasma spectrometer
Type: Apex SLR
Manufacturer: Plasma-Therm (U.S.A)
Applications: Semiconductors, MEMS/NEMS, Solar Cells, Photonics, Optics, Failure Analysis, R&D, Prototyping
RIE/ICP Etcher with capabilities of etching Si, oxides, nitrides, metals and polymers.
System can accommodate sample sizes ranging from full 6" wafers to odd size parts and pieces.
Samples other than 6" wafers are mounted on a 6" carrier wafer.