FIELD EMISSION SCANNING EIECTRON MICROSCOPE

The field emission scanning electron microscope scans the sample with the focused high-energy electron beam to excite various physical  information, and realizes the characterization of the sample by receiving, amplifying and displaying the information. The scanning electron microscope can achieve a resolution of 0.8 nm at 15 kV; it is equipped with a secondary electron detector to analyze the surface morphology of the sample, a backscatter detector to analyze the sample composition, a energy spectrometercollecting the X-ray to   analyze sample composition, a spectrometer to measure the wavelength for sample composition analysis and an Electron Backscattered   Diffraction (EBSD) instrument to analyze the crystal orientation of the sample.